scanning electron microscopy
scanning electron microscopy energy dispersive X-ray spectroscopy
SEM/EDXA
SEM-EDXA
scanning electron microscopy-energy dispersive X-ray spectroscopy
Microscopy where a finely focused (<10 nm diameter) electron beam with an acceleration voltage 50-150 kV is scanned across the specimen under vacuum. The interaction of electrons with the specimen produces X-rays (with energies characteristic of atomic number) which are detected as a function of wavelength.
CHMO:0000077
SEM/EDX
scanning electron microscopy/energy dispersive X-ray spectroscopy
SEM-EDX
SEM EDX
scanning electron microscopy/energy dispersive X-ray analysis