scanning probe microscopy
scanning capacitance microscopy
Microscopy which uses a small electrode to scan the surface of the specimen. An image of the surface is obtained by mechanically moving the probe in a raster scan of the specimen, line by line, and recording the electrostatic capacitance of the surface as a function of position. A feedback loop is used to maintain a fixed relationship between the electrode and surface during scanning.
scanning-capacitance microscopy
CHMO:0000117
SCAM