plasma-assisted chemical vapour deposition
microwave plasma-assisted chemical vapour deposition
CHMO:0001326
MPCVD
microwave plasma enhanced CVD
A synthesis method where the substrate is exposed to one or more volatile precursors, in the presence of a microwave-induced plasma (a partially ionised gas containing free electrons), which react or decompose on the surface to produce a deposit. The plasma enhances the rate of reaction on the substrate surface.
microwave plasma-assisted CVD
microwave plasma assisted CVD
microwave plasma-enhanced CVD
microwave plasma-assisted chemical vapor deposition