ellipsometer
spectroscopic ellipsometer
2010-01-16T03:28:46Z
https://orcid.org/0000-0001-5985-7429
CHMO:0002683
A piece of apparatus, consisting of a light source, a polariser, a compensator (which elliptically polarises the light) and a detector, which is used to measure the intensity and change in polarisation of light reflected by a sample as a function of wavelength. This information in turn can be used to determine refractive index and thin film thickness.